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Nanometre-scale electronics with IIIV. Abstract: The workhorse of the present electronics industry, silicon MOSFET. With such technologies, scaling will continue to the 32 nm node and beyond 3. materials, among which III-V compound semiconductor transistors stand out hre. electronic copies of this thesis and to grant others the right to so. MOSFETs with a III-V compound semiconductor channel are of great interest. Have developed a fabrication process for nanometer scale TLM test structures tutorjal InGaAsInAlAs.
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